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Scanning Spreading Resistance Microscopy (SSRM): High resolution 2D and 3D carrier mapping of semiconductor nanostructures

dc.contributor.authorSchulze, Andreas
dc.contributor.authorEyben, Pierre
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T13:09:32Z
dc.date.available2021-10-24T13:09:32Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29399
dc.sourceIIOimport
dc.titleScanning Spreading Resistance Microscopy (SSRM): High resolution 2D and 3D carrier mapping of semiconductor nanostructures
dc.typeBook chapter
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.beginpage377
dc.source.bookMetrology and Diagnostic Techniques for Nanoelectronics
dc.source.endpage445
dc.identifier.urlhttps://www.crcpress.com/Metrology-and-Diagnostic-Techniques-for-Nanoelectronics/Ma-Seiler/p/book/9789814745086
imec.availabilityPublished - imec
imec.internalnotesISBN 9789814745086


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