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Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications

dc.contributor.authorSedky, Sherif
dc.contributor.authorFiorini, Paolo
dc.contributor.authorCaymax, Matty
dc.contributor.authorLoreti, S.
dc.contributor.authorBaert, Kris
dc.contributor.authorHermans, Lou
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-01T08:54:34Z
dc.date.available2021-10-01T08:54:34Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2941
dc.sourceIIOimport
dc.titleStructural and mechanical properties of polycrystalline silicon germanium for micromachining applications
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMertens, Robert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage365
dc.source.endpage372
dc.source.journalJournal of Microelectromechanical Systems
dc.source.issue4
dc.source.volume7
imec.availabilityPublished - open access


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