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IR bolometers made of polycrystalline silicon germanium

dc.contributor.authorSedky, Sherif
dc.contributor.authorFiorini, Paolo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVerbist, Agnes
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-10-01T08:54:46Z
dc.date.available2021-10-01T08:54:46Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2942
dc.sourceIIOimport
dc.titleIR bolometers made of polycrystalline silicon germanium
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage193
dc.source.endpage199
dc.source.journalSensors and Actuators A
dc.source.volumeA66
imec.availabilityPublished - open access
imec.internalnotes9th International Solid State Sensors and Actuators Conference (Transducers '97). 16-19 June 1997; Chicago, IL, USA


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