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Investigation of Self-Assembled Monolayers (SAM) for Advanced Interconnects Schemes

dc.contributor.authorSun, Yiting
dc.date.accessioned2021-10-24T14:27:51Z
dc.date.available2021-10-24T14:27:51Z
dc.date.issued2017-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29525
dc.sourceIIOimport
dc.titleInvestigation of Self-Assembled Monolayers (SAM) for Advanced Interconnects Schemes
dc.typePHD thesis
dc.contributor.imecauthorSun, Yiting
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Feyter, Steven
dc.contributor.thesisadvisorArmini, Silvia
dc.identifier.urlhttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1725113&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1
imec.availabilityPublished - open access


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