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Contrast reversal in scanning capacitance microscopy imaging

dc.contributor.authorStephenson, Robert
dc.contributor.authorVerhulst, Anne
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-01T09:01:51Z
dc.date.available2021-10-01T09:01:51Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2976
dc.sourceIIOimport
dc.titleContrast reversal in scanning capacitance microscopy imaging
dc.typeJournal article
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2597
dc.source.endpage2599
dc.source.journalApplied Physics Letters
dc.source.issue18
dc.source.volume73
imec.availabilityPublished - open access


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