Show simple item record

Dissolution rate monitor tool to measure EUV photoresist dissolution

dc.contributor.authorVesters, Yannick
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-24T18:10:49Z
dc.date.available2021-10-24T18:10:49Z
dc.date.issued2017
dc.identifier.issn0914-9244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29868
dc.sourceIIOimport
dc.titleDissolution rate monitor tool to measure EUV photoresist dissolution
dc.typeJournal article
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage675
dc.source.endpage681
dc.source.journalJournal of Photopolymer Science and Technology
dc.source.issue6
dc.source.volume30
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record