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Impact of the silicon substrate resistivity and growth condition on the deep levels in Ni-Au/AlN/Si MIS capacitors

dc.contributor.authorWang, Chong
dc.contributor.authorSimoen, Eddy
dc.contributor.authorZhao, Ming
dc.contributor.authorLi, Wei
dc.date.accessioned2021-10-24T18:29:07Z
dc.date.available2021-10-24T18:29:07Z
dc.date.issued2017
dc.identifier.issn0268-1242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29895
dc.sourceIIOimport
dc.titleImpact of the silicon substrate resistivity and growth condition on the deep levels in Ni-Au/AlN/Si MIS capacitors
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorZhao, Ming
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.source.peerreviewyes
dc.source.beginpage105002
dc.source.journalSemiconductor Science and Technology
dc.source.issue10
dc.source.volume32
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/1361-6641/aa7e20
imec.availabilityPublished - imec


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