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dc.contributor.authorPoortmans, Jef
dc.contributor.authorJain, Suresh
dc.contributor.authorNijs, Johan
dc.contributor.authorVan Overstraeten, Roger
dc.date.accessioned2021-09-29T12:45:31Z
dc.date.available2021-09-29T12:45:31Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/299
dc.sourceIIOimport
dc.titleMaterials properties of (strained) SiGe layers
dc.typeBook chapter
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage185
dc.source.bookAdvanced Silicon and Semiconducting Silicon-Alloy Based Materials and Devices
dc.source.endpage214
imec.availabilityPublished - open access
imec.internalnotesChapter 5


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