Browsing Book chapters by author "Maex, Karen"
Now showing items 1-5 of 5
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Atomic-layer deposited barrier and seed layers for interconnects
Schuhmacher, Jorg; Martin Hoyas, Ana; Satta, Alessandra; Maex, Karen (2005) -
Revealing the porous structure of low-k materials through solvent diffusion
Shamiryan, Denis; Baklanov, Mikhaïl; Maex, Karen (2005) -
Selective airgaps: towards a scalable lowk solution
Gueneau de Mussy, Jean Paul; Beyer, Gerald; Maex, Karen (2005) -
Silicides - Recent advances and prospects
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Kmieciak, Malgorzata; Van Dal, Mark; Veloso, Anabela; Kottantharayil, Anil; Pourtois, Geoffrey; de Potter de ten Broeck, Muriel; Maex, Karen (2005) -
Surface engineering using self-assembled monolayers: model substrates for atomic-layer deposition
Whelan, Caroline; Demas, Anne-Cécile; Romo Negreira, Ainhoa; Fernandez Landaluce, Tatiana; Schuhmacher, Jorg; Carbonell, Laure; Maex, Karen (2005)