Atomic-layer deposited barrier and seed layers for interconnects

Thumbnail
View/open
Metadata
Show full item record
Authors
Schuhmacher, Jorg; Martin Hoyas, Ana; Satta, Alessandra; Maex, Karen
Book
Materials for Information Technology. Devices, Interconnects and Packaging
Title
Atomic-layer deposited barrier and seed layers for interconnects
Publication type
Book chapter
Embargo date
9999-12-31
Collections