Nanopotentiometry: Local potential measurements in complementary metal-oxide-semiconductor transistors using atomic force microscopy
dc.contributor.author | Trenkler, Thomas | |
dc.contributor.author | De Wolf, Peter | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Hellemans, L. | |
dc.date.accessioned | 2021-10-01T09:07:05Z | |
dc.date.available | 2021-10-01T09:07:05Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3000 | |
dc.source | IIOimport | |
dc.title | Nanopotentiometry: Local potential measurements in complementary metal-oxide-semiconductor transistors using atomic force microscopy | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 367 | |
dc.source.endpage | 372 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 1 | |
dc.source.volume | 16 | |
imec.availability | Published - open access |