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Ultra-compact silicon nitride grating coupler for microscopy system

dc.contributor.authorZhu, Yunpeng
dc.contributor.authorWang, Jie
dc.contributor.authorXie, Weiqiang
dc.contributor.authorTian, Bin
dc.contributor.authorLi, YanLu
dc.contributor.authorBrainis, Edouard
dc.contributor.authorJiao, Yuqing
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-24T20:05:51Z
dc.date.available2021-10-24T20:05:51Z
dc.date.issued2017-12
dc.identifier.issn1094-4087
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30029
dc.sourceIIOimport
dc.titleUltra-compact silicon nitride grating coupler for microscopy system
dc.typeJournal article
dc.contributor.imecauthorLi, YanLu
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecLi, YanLu::0000-0003-3440-1972
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage33297
dc.source.endpage33304
dc.source.journalOptics Express
dc.source.issue26
dc.source.volume25
dc.identifier.urlhttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-25-26-33297
imec.availabilityPublished - open access


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