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Deep level assessment of n-type Si/SiO2 metal-oxide-semiconductor capacitors with embedded Ge quantum dots

dc.contributor.authorAouassa, Mansour
dc.contributor.authorVrielinck, Henk
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-25T16:34:07Z
dc.date.available2021-10-25T16:34:07Z
dc.date.issued2018
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30140
dc.sourceIIOimport
dc.titleDeep level assessment of n-type Si/SiO2 metal-oxide-semiconductor capacitors with embedded Ge quantum dots
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageP24
dc.source.endpageP28
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue2
dc.source.volume7
dc.identifier.urlhttp://jss.ecsdl.org/content/7/2/P24.full
imec.availabilityPublished - open access


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