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Micromachined photodiode submount with integrated mirror for efficient out-of-pane coupling to planar polymeric waveguide circuits

dc.contributor.authorVan der Linden, J. E.
dc.contributor.authorDe Dobbelaere, Peter
dc.contributor.authorVan Daele, Peter
dc.contributor.authorDiemeer, M. B.
dc.date.accessioned2021-10-01T09:12:18Z
dc.date.available2021-10-01T09:12:18Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3024
dc.sourceIIOimport
dc.titleMicromachined photodiode submount with integrated mirror for efficient out-of-pane coupling to planar polymeric waveguide circuits
dc.typeJournal article
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3730
dc.source.endpage3735
dc.source.journalJapanese Journal of Applied Physics. Part 1
dc.source.issue6B
dc.source.volume37
imec.availabilityPublished - open access


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