Micromachined photodiode submount with integrated mirror for efficient out-of-pane coupling to planar polymeric waveguide circuits
dc.contributor.author | Van der Linden, J. E. | |
dc.contributor.author | De Dobbelaere, Peter | |
dc.contributor.author | Van Daele, Peter | |
dc.contributor.author | Diemeer, M. B. | |
dc.date.accessioned | 2021-10-01T09:12:18Z | |
dc.date.available | 2021-10-01T09:12:18Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3024 | |
dc.source | IIOimport | |
dc.title | Micromachined photodiode submount with integrated mirror for efficient out-of-pane coupling to planar polymeric waveguide circuits | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Daele, Peter | |
dc.contributor.orcidimec | Van Daele, Peter::0000-0003-0557-7741 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 3730 | |
dc.source.endpage | 3735 | |
dc.source.journal | Japanese Journal of Applied Physics. Part 1 | |
dc.source.issue | 6B | |
dc.source.volume | 37 | |
imec.availability | Published - open access |