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Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorFolkersma, Steven
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorSchulze, Andreas
dc.contributor.authorMoussa, Alain
dc.contributor.authorPetersen, Dirch
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik
dc.contributor.authorNielsen, Peter
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T16:49:01Z
dc.date.available2021-10-25T16:49:01Z
dc.date.issued2018
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30280
dc.sourceIIOimport
dc.titleWidth-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.source.peerreviewyes
dc.source.beginpage1700857
dc.source.journalPhysica Status Solidi A
dc.source.issue6
dc.source.volume215
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201700857/abstract;jsessionid=4B590B8573913545910A4BBD2F57931E.f01t03
imec.availabilityPublished - imec


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