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Mesoscopic physical removal of material using sliding nano-diamond contacts

dc.contributor.authorCelano, Umberto
dc.contributor.authorHsia, Feng Chun
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorParedis, Kristof
dc.contributor.authorNordling, Torbjörn
dc.contributor.authorBuijnsters, Josephus
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T17:06:01Z
dc.date.available2021-10-25T17:06:01Z
dc.date.issued2018
dc.identifier.issn2045-2322
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30375
dc.sourceIIOimport
dc.titleMesoscopic physical removal of material using sliding nano-diamond contacts
dc.typeJournal article
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2994
dc.source.journalScientific Reports
dc.source.volume8
dc.identifier.urlhttps://www.nature.com/articles/s41598-018-21171-w
imec.availabilityPublished - open access


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