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Modeling the topography of uneven substrates post spin-coating

dc.contributor.authorDecoster, Stefan
dc.contributor.authorXiaoyu, Piao
dc.contributor.authorGillijns, Werner
dc.contributor.authorLazzarino, Frederic
dc.date.accessioned2021-10-25T17:55:54Z
dc.date.available2021-10-25T17:55:54Z
dc.date.issued2018
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30574
dc.sourceIIOimport
dc.titleModeling the topography of uneven substrates post spin-coating
dc.typeJournal article
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorGillijns, Werner
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage3.00E+102
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume36
dc.identifier.urlhttps://doi.org/10.1116/1.5022166
imec.availabilityPublished - open access


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