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CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits

dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorSpessot, Alessio
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorFazan, Pierre
dc.contributor.authorJi, Yunhyuck
dc.contributor.authorMannaert, Geert
dc.contributor.authorLorant, Christophe
dc.contributor.authorSebaai, Farid
dc.contributor.authorThiam, Arame
dc.contributor.authorErcken, Monique
dc.contributor.authorDemuynck, Steven
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-25T18:02:43Z
dc.date.available2021-10-25T18:02:43Z
dc.date.issued2018
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30596
dc.sourceIIOimport
dc.titleCMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits
dc.typeJournal article
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorFazan, Pierre
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage04FB08
dc.source.journalJapanese Journal of Applied Physics
dc.source.issue4S
dc.source.volume57
dc.identifier.urlhttp://iopscience.iop.org/article/10.7567/JJAP.57.04FB08/meta
imec.availabilityPublished - open access


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