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Development and synchrotron-based characterization of Al and Cr nanostructures as potential calibration samples for 3D analytical techniques

dc.contributor.authorDialameh, Masoud
dc.contributor.authorFerrarese Lupi, Federico
dc.contributor.authorHönicke, Philipp
dc.contributor.authorKayser, Yves
dc.contributor.authorBeckhoff, Burkhard
dc.contributor.authorWeimann, Thomas
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDub "cek, Pavo
dc.contributor.authorPivac, Branko
dc.contributor.authorPerego, Michele
dc.contributor.authorSeguini, Gabriele
dc.contributor.authorDe Leo, Natascia
dc.contributor.authorBoarino, Luca
dc.date.accessioned2021-10-25T18:14:46Z
dc.date.available2021-10-25T18:14:46Z
dc.date.issued2018
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30634
dc.sourceIIOimport
dc.titleDevelopment and synchrotron-based characterization of Al and Cr nanostructures as potential calibration samples for 3D analytical techniques
dc.typeJournal article
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.source.peerreviewyes
dc.source.beginpage1700866
dc.source.journalPhysica Status Solidi A
dc.source.issue6
dc.source.volume215
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201700866/abstract
imec.availabilityPublished - imec


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