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Finite size effects in highly scaled ruthenium interconnects

dc.contributor.authorDutta, Shibesh
dc.contributor.authorMoors, Kristof
dc.contributor.authorVandemaele, Michiel
dc.contributor.authorAdelmann, Christoph
dc.date.accessioned2021-10-25T18:22:55Z
dc.date.available2021-10-25T18:22:55Z
dc.date.issued2018
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30660
dc.sourceIIOimport
dc.titleFinite size effects in highly scaled ruthenium interconnects
dc.typeJournal article
dc.contributor.imecauthorVandemaele, Michiel
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecVandemaele, Michiel::0000-0003-0740-4115
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.identifier.doi10.1109/LED.2017.2788889
dc.source.peerreviewyes
dc.source.beginpage268
dc.source.endpage271
dc.source.journalIEEE Electron Device Letters
dc.source.issue2
dc.source.volume39
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8244288/
imec.availabilityPublished - imec


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