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MoS2 synthesis by Gas Source MBE for transition metal dichalcogenides integration on large scale substrates

dc.contributor.authorEl Kazzi, Salim
dc.contributor.authorMortelmans, Wouter
dc.contributor.authorNuytten, Thomas
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorCarolan, Patrick
dc.contributor.authorLandeloos, Lien
dc.contributor.authorConard, Thierry
dc.contributor.authorRadu, Iuliana
dc.contributor.authorHeyns, Marc
dc.contributor.authorMerckling, Clement
dc.date.accessioned2021-10-25T18:24:57Z
dc.date.available2021-10-25T18:24:57Z
dc.date.issued2018
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30666
dc.sourceIIOimport
dc.titleMoS2 synthesis by Gas Source MBE for transition metal dichalcogenides integration on large scale substrates
dc.typeJournal article
dc.contributor.imecauthorMortelmans, Wouter
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorCarolan, Patrick
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMerckling, Clement
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecCarolan, Patrick::0000-0001-5931-3093
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.source.peerreviewyes
dc.source.beginpage135702
dc.source.journalJournal of Applied Physics
dc.source.issue13
dc.source.volume123
dc.identifier.urlhttps://aip.scitation.org/doi/10.1063/1.5008933
imec.availabilityPublished - imec


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