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Revealing the three-dimensional shape of atom probe tips by atomic force microscopy

dc.contributor.authorFleischmann, Claudia
dc.contributor.authorParedis, Kristof
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T18:40:43Z
dc.date.available2021-10-25T18:40:43Z
dc.date.issued2018
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30712
dc.sourceIIOimport
dc.titleRevealing the three-dimensional shape of atom probe tips by atomic force microscopy
dc.typeJournal article
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.source.peerreviewyes
dc.source.beginpage221
dc.source.endpage226
dc.source.journalUltramicroscopy
dc.source.volume194
dc.identifier.urlhttps://www.sciencedirect.com/science/article/abs/pii/S030439911730445X
imec.availabilityPublished - imec


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