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Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines..

dc.contributor.advisortest
dc.contributor.authorVandamme, Ewout
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorLauwers, Anne
dc.contributor.authorVandamme, Lorenz
dc.date.accessioned2021-10-01T09:25:30Z
dc.date.available2021-10-01T09:25:30Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3074
dc.sourceIIOimport
dc.titleLow frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines..
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorLauwers, Anne
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage925
dc.source.endpage929
dc.source.journalMicroelectronics Reliability
dc.source.issue6_8
dc.source.volume38
imec.availabilityPublished - imec


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