Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines..
dc.contributor.advisor | test | |
dc.contributor.author | Vandamme, Ewout | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Vandamme, Lorenz | |
dc.date.accessioned | 2021-10-01T09:25:30Z | |
dc.date.available | 2021-10-01T09:25:30Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3074 | |
dc.source | IIOimport | |
dc.title | Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines.. | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 925 | |
dc.source.endpage | 929 | |
dc.source.journal | Microelectronics Reliability | |
dc.source.issue | 6_8 | |
dc.source.volume | 38 | |
imec.availability | Published - imec |
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