Industrial application of atom probe tomography to semiconductor devices
dc.contributor.author | Giddings, Alexander Devin | |
dc.contributor.author | Koelling, Sebastian | |
dc.contributor.author | Shimizu, Shimizu | |
dc.contributor.author | Estivill, Robert | |
dc.contributor.author | Inoue, Koji | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Yeoh, Wai Kong | |
dc.date.accessioned | 2021-10-25T19:02:32Z | |
dc.date.available | 2021-10-25T19:02:32Z | |
dc.date.issued | 2018 | |
dc.identifier.issn | 1359-6462 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30770 | |
dc.source | IIOimport | |
dc.title | Industrial application of atom probe tomography to semiconductor devices | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | yes | |
dc.source.beginpage | 82 | |
dc.source.endpage | 90 | |
dc.source.journal | Scripta Materialia | |
dc.source.volume | 148 | |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S1359646217305146 | |
imec.availability | Published - imec |
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