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Thermal recrystallization of short-range ordered WS2 films

dc.contributor.authorHeyne, Markus
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorRadu, Iuliana
dc.contributor.authorNeyts, Erik C.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-25T19:46:59Z
dc.date.available2021-10-25T19:46:59Z
dc.date.issued2018
dc.identifier.issn0734-2101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30884
dc.sourceIIOimport
dc.titleThermal recrystallization of short-range ordered WS2 films
dc.typeJournal article
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage05G501-1
dc.source.endpage05G501-11
dc.source.journalJournal of Vacuum Science and Technology A
dc.source.issue5
dc.source.volume36
dc.identifier.urlhttps://avs.scitation.org/doi/10.1116/1.5036654
imec.availabilityPublished - imec


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