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FinFET EOT extraction from accumulation capacitance measurements

dc.contributor.authorHiblot, Gaspard
dc.date.accessioned2021-10-25T19:49:24Z
dc.date.available2021-10-25T19:49:24Z
dc.date.issued2018
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30890
dc.sourceIIOimport
dc.titleFinFET EOT extraction from accumulation capacitance measurements
dc.typeJournal article
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.source.peerreviewyes
dc.source.beginpage874
dc.source.endpage880
dc.source.journalIEEE Transactions on Electron Devices
dc.source.issue3
dc.source.volume65
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8278829/
imec.availabilityPublished - imec


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