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Impact of local-interconnect to gate overlay on series resistance compensation for saturation velocity extraction

dc.contributor.authorHiblot, Gaspard
dc.date.accessioned2021-10-25T19:49:46Z
dc.date.available2021-10-25T19:49:46Z
dc.date.issued2018
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30891
dc.sourceIIOimport
dc.titleImpact of local-interconnect to gate overlay on series resistance compensation for saturation velocity extraction
dc.typeJournal article
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.source.peerreviewyes
dc.source.beginpage215
dc.source.endpage220
dc.source.journalIEEE Transactions on Semiconductor Manufacturing
dc.source.issue2
dc.source.volume31
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8288698/
imec.availabilityPublished - imec


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