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Full loop equivalent circuit model for plasma induced damage simulation

dc.contributor.authorHiblot, Gaspard
dc.contributor.authorVan der Plas, Geert
dc.date.accessioned2021-10-25T19:50:55Z
dc.date.available2021-10-25T19:50:55Z
dc.date.issued2018
dc.identifier.issn0093-3813
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30894
dc.sourceIIOimport
dc.titleFull loop equivalent circuit model for plasma induced damage simulation
dc.typeJournal article
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage3677
dc.source.endpage3682
dc.source.journalIEEE Transactions on Plasma Science
dc.source.issue10
dc.source.volume46
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8418470
imec.availabilityPublished - open access


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