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Dopant/carrier profiling for ULSI

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.date.accessioned2021-10-01T09:29:41Z
dc.date.available2021-10-01T09:29:41Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3090
dc.sourceIIOimport
dc.titleDopant/carrier profiling for ULSI
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.journalFuture Fab International
dc.source.issue4
imec.availabilityPublished - imec


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