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Formation and wet removal of organic and titanium-containing residues on patterned TiN/porous low-k structure

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-25T21:40:51Z
dc.date.available2021-10-25T21:40:51Z
dc.date.issued2018-11
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31137
dc.sourceIIOimport
dc.titleFormation and wet removal of organic and titanium-containing residues on patterned TiN/porous low-k structure
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.source.peerreviewyes
dc.source.beginpageP602
dc.source.endpageP607
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue11
dc.source.volume7
dc.identifier.urlhttp://jss.ecsdl.org/content/7/11/P602.abstract
imec.availabilityPublished - imec


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