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Monolithic integration of InGaAs on Si(001) substrate for logic devices

dc.contributor.authorMerckling, Clement
dc.date.accessioned2021-10-25T23:23:45Z
dc.date.available2021-10-25T23:23:45Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31335
dc.sourceIIOimport
dc.titleMonolithic integration of InGaAs on Si(001) substrate for logic devices
dc.typeBook chapter
dc.contributor.imecauthorMerckling, Clement
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.source.peerreviewyes
dc.source.beginpage71
dc.source.bookHigh Mobility Materials for CMOS Applications
dc.source.endpage114
dc.identifier.urlhttps://www.sciencedirect.com/science/article/pii/B9780081020616000033
imec.availabilityPublished - imec
imec.internalnotesWoodhead Publishing Series in Electronic and Optical Materials. ISBN: 978-0-08-102061-6


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