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Metrology for the next generation of semiconductor devices

dc.contributor.authorOrji, N.G.
dc.contributor.authorBadaroglu, M.
dc.contributor.authorBarnes, B.M.
dc.contributor.authorBeitia, C.
dc.contributor.authorBunday, B.D.
dc.contributor.authorCelano, Umberto
dc.contributor.authorKline, R.J.
dc.contributor.authorNeisser, M.
dc.contributor.authorObeng, Y.
dc.contributor.authorVladar, A.E.
dc.date.accessioned2021-10-26T00:29:05Z
dc.date.available2021-10-26T00:29:05Z
dc.date.issued2018
dc.identifier.issn2520-1131
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31454
dc.sourceIIOimport
dc.titleMetrology for the next generation of semiconductor devices
dc.typeJournal article
dc.contributor.imecauthorCelano, Umberto
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.source.peerreviewyes
dc.source.beginpage532
dc.source.endpage547
dc.source.journalNature Electronics
dc.source.volume1
dc.identifier.urlhttps://doi.org/10.1038/s41928-018-0150-9
imec.availabilityPublished - imec


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