Leaping into the unknown with 0.18 μm

dc.contributor.author	Wauters, Jan
dc.date.accessioned	2021-10-01T09:46:32Z
dc.date.available	2021-10-01T09:46:32Z
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3150
dc.source	IIOimport
dc.title	Leaping into the unknown with 0.18 μm
dc.type	Journal article
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	111
dc.source.endpage	116
dc.source.journal	Semiconductor International
dc.source.issue	10
dc.source.volume	21
imec.availability	Published - imec