Show simple item record

Fundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental Verification

dc.contributor.authorRonse, Kurt
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorVan den hove, Luc
dc.contributor.authorEngelen, J.
dc.date.accessioned2021-09-29T12:46:07Z
dc.date.available2021-09-29T12:46:07Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/315
dc.sourceIIOimport
dc.titleFundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental Verification
dc.typeJournal article
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorVan den hove, Luc
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.source.peerreviewno
dc.source.beginpage589
dc.source.endpage600
dc.source.journalJ. Vac. Sci. Technol. B
dc.source.issue2
dc.source.volume12
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record