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Nano-Electro-Mechanical Relays. Design, Fabrication, and Characterization

dc.contributor.authorRamezani, Maliheh
dc.date.accessioned2021-10-26T02:04:09Z
dc.date.available2021-10-26T02:04:09Z
dc.date.issued2018-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31613
dc.sourceIIOimport
dc.titleNano-Electro-Mechanical Relays. Design, Fabrication, and Characterization
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Meyer, Kristin
dc.contributor.thesisadvisorSeveri, Simone
imec.availabilityPublished - open access


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