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ALD assisted nanoplasmonic slot waveguide for on-chip enhanced raman spectroscopy

dc.contributor.authorRaza, Ali
dc.contributor.authorClemmen, Stephane
dc.contributor.authorWuytens, Pieter
dc.contributor.authorMuneeb, Muhammad
dc.contributor.authorVan Daele, Micheil
dc.contributor.authorDendooven, Jolien
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorSkirtach, Andre
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-26T02:22:09Z
dc.date.available2021-10-26T02:22:09Z
dc.date.issued2018-10
dc.identifier.issn2378-0967
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31640
dc.sourceIIOimport
dc.titleALD assisted nanoplasmonic slot waveguide for on-chip enhanced raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorRaza, Ali
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorWuytens, Pieter
dc.contributor.imecauthorMuneeb, Muhammad
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecWuytens, Pieter::0000-0002-0793-256X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage116105
dc.source.journalAPL Photonics
dc.source.volume3
dc.identifier.urlhttps://doi.org/10.1063/1.5048266
imec.availabilityPublished - open access


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