Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy
dc.contributor.author | Zhang, Feng | |
dc.contributor.author | Liu, X. | |
dc.contributor.author | Jin, S. | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Lou, N. Z. | |
dc.contributor.author | Wilson, Z. H. | |
dc.date.accessioned | 2021-10-01T09:51:45Z | |
dc.date.available | 2021-10-01T09:51:45Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3167 | |
dc.source | IIOimport | |
dc.title | Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 61 | |
dc.source.endpage | 66 | |
dc.source.journal | Nuclear Instruments and Methods. B | |
dc.source.issue | 1_2 | |
dc.source.volume | 42 | |
imec.availability | Published - open access |