Recent advances in silicide technologies
| dc.contributor.editor | Maex, Karen | |
| dc.date.accessioned | 2021-10-06T10:40:50Z | |
| dc.date.available | 2021-10-06T10:40:50Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3174 | |
| dc.source | IIOimport | |
| dc.title | Recent advances in silicide technologies | |
| dc.type | Book chapter | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 851 | |
| dc.source.book | Properties of Crystalline Silicon | |
| dc.source.endpage | 862 | |
| imec.availability | Published - imec |
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