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The critical need and future directions of SIMS

dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2021-10-26T06:39:06Z
dc.date.available2021-10-26T06:39:06Z
dc.date.issued2018
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32034
dc.sourceIIOimport
dc.titleThe critical need and future directions of SIMS
dc.typeJournal article
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.beginpage03F105
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume36
dc.identifier.urlhttps://avs.scitation.org/doi/10.1116/1.5008465
imec.availabilityPublished - imec


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