dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Vanhaelemeersch, Serge | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-06T10:41:39Z | |
dc.date.available | 2021-10-06T10:41:39Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3210 | |
dc.source | IIOimport | |
dc.title | Effects of oxygen and fluorine on the dry etch characteristics of organic low-k dielectrics | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
dc.source.peerreview | no | |
dc.source.beginpage | 372 | |
dc.source.endpage | 379 | |
dc.source.journal | J. Vacuum Science and Technology B | |
dc.source.issue | 2 | |
dc.source.volume | 17 | |
imec.availability | Published - imec | |