Al speed fill
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Daniels, Stephen | |
| dc.contributor.author | Lee, S. | |
| dc.contributor.author | Proost, Joris | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Judelewicz, Moshe | |
| dc.contributor.author | Maity, Nirmalya | |
| dc.date.accessioned | 2021-10-06T10:42:39Z | |
| dc.date.available | 2021-10-06T10:42:39Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3230 | |
| dc.source | IIOimport | |
| dc.title | Al speed fill | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 75 | |
| dc.source.endpage | 78 | |
| dc.source.journal | Materials Science in Semiconductor Processing | |
| dc.source.issue | 1 | |
| dc.source.volume | 2 | |
| imec.availability | Published - open access |