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High-alignment-accuracy transfer printing of passive silicon waveguide structures

dc.contributor.authorYe, Nan
dc.contributor.authorMuliuk, Grigorij
dc.contributor.authorTrindade, Antonio jose
dc.contributor.authorBower, Chris
dc.contributor.authorZhang, Jing
dc.contributor.authorUvin, Sarah
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorRoelkens, Gunther
dc.date.accessioned2021-10-26T10:12:19Z
dc.date.available2021-10-26T10:12:19Z
dc.date.issued2018-01
dc.identifier.issn1094-4087
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32331
dc.sourceIIOimport
dc.titleHigh-alignment-accuracy transfer printing of passive silicon waveguide structures
dc.typeJournal article
dc.contributor.imecauthorMuliuk, Grigorij
dc.contributor.imecauthorZhang, Jing
dc.contributor.imecauthorUvin, Sarah
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.orcidimecZhang, Jing::0000-0001-6608-9990
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2023
dc.source.endpage2032
dc.source.journalOptics Express
dc.source.issue2
dc.source.volume26
dc.identifier.urlhttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-26-2-2023
imec.availabilityPublished - open access


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