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Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept

dc.contributor.authorAbrenica, Graniel
dc.contributor.authorLebedev, Mikhail
dc.contributor.authorPacco, Antoine
dc.contributor.authorCalvet, Wolfram
dc.contributor.authorMayer, Thomas
dc.contributor.authorvan Dorp, Dennis
dc.date.accessioned2021-10-27T07:25:03Z
dc.date.available2021-10-27T07:25:03Z
dc.date.issued2019
dc.identifier.issn1359-7345
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32402
dc.sourceIIOimport
dc.titleVisualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept
dc.typeJournal article
dc.contributor.imecauthorAbrenica, Graniel
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.source.peerreviewyes
dc.source.beginpage10864
dc.source.endpage10867
dc.source.journalChemical Communications
dc.source.issue73
dc.source.volume55
dc.identifier.urlhttps://pubs.rsc.org/en/content/articlelanding/2019/cc/c9cc05376j#!divAbstract
imec.availabilityPublished - imec


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