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Characterising differences between measurement and calibration wafer in probe-tip calibrations

dc.contributor.authorCarchon, Geert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorSchreurs, Dominique
dc.contributor.authorVandenberghe, S.
dc.date.accessioned2021-10-06T10:47:18Z
dc.date.available2021-10-06T10:47:18Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3289
dc.sourceIIOimport
dc.titleCharacterising differences between measurement and calibration wafer in probe-tip calibrations
dc.typeJournal article
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorSchreurs, Dominique
dc.source.peerreviewno
dc.source.beginpage1087
dc.source.endpage1088
dc.source.journalElectronics Letters
dc.source.issue13
dc.source.volume35
imec.availabilityPublished - imec


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