Electrical quality assessment of epitaxial wafers based on p-n junction diagnostics
dc.contributor.author | Claeys, C. | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Poyai, Amporn | |
dc.contributor.author | Czerwinski, A. | |
dc.date.accessioned | 2021-10-06T10:47:53Z | |
dc.date.available | 2021-10-06T10:47:53Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3295 | |
dc.source | IIOimport | |
dc.title | Electrical quality assessment of epitaxial wafers based on p-n junction diagnostics | |
dc.type | Journal article | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.source.peerreview | no | |
dc.source.beginpage | 3429 | |
dc.source.endpage | 3434 | |
dc.source.journal | J. Electrochem. Soc. | |
dc.source.issue | 9 | |
dc.source.volume | 146 | |
imec.availability | Published - imec |
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