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Electrical quality assessment of epitaxial wafers based on p-n junction diagnostics

dc.contributor.authorClaeys, C.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorCzerwinski, A.
dc.date.accessioned2021-10-06T10:47:53Z
dc.date.available2021-10-06T10:47:53Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3295
dc.sourceIIOimport
dc.titleElectrical quality assessment of epitaxial wafers based on p-n junction diagnostics
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage3429
dc.source.endpage3434
dc.source.journalJ. Electrochem. Soc.
dc.source.issue9
dc.source.volume146
imec.availabilityPublished - imec


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