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Evaluation of alternative vertical transistors for 3D NAND applications

dc.contributor.authorFlorent, Karine
dc.date.accessioned2021-10-27T09:15:47Z
dc.date.available2021-10-27T09:15:47Z
dc.date.issued2019-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32970
dc.sourceIIOimport
dc.titleEvaluation of alternative vertical transistors for 3D NAND applications
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorGroeseneken, Guido
dc.contributor.thesisadvisorVan Houdt, Jan
imec.availabilityPublished - open access


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