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On the applicability of Tougaard background subtraction to general Auger spectra

dc.contributor.authorBender, Hugo
dc.date.accessioned2021-09-29T12:39:46Z
dc.date.available2021-09-29T12:39:46Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32
dc.sourceIIOimport
dc.titleOn the applicability of Tougaard background subtraction to general Auger spectra
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage101
dc.source.endpage109
dc.source.journalSurface and Interface Analysis
dc.source.issue2
dc.source.volume21
imec.availabilityPublished - imec
imec.internalnotesPaper of the 15th Symposium on Applied Surface Analysis; June 1993; Cleveland, OH, USA


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