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XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers

dc.contributor.authorConard, Thierry
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorLoo, Roger
dc.contributor.authorVerheyden, P.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.contributor.authorGijbels, Renaat
dc.date.accessioned2021-10-06T10:49:39Z
dc.date.available2021-10-06T10:49:39Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3311
dc.sourceIIOimport
dc.titleXPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpage583
dc.source.endpage586
dc.source.journalThin Solid Films
dc.source.volume343-344
imec.availabilityPublished - imec
imec.internalnotes14th Intern. Vacuum Congress (IVC-14). 10th Intern. Conf. on Solid Surfaces (ICSS-10). 5th Intern. Conf. on Nanometer-Scale Science and Technology (NANO-5). 10th Intern. Conf. on Quantitative Surface Analysis (QSA-10). 31 Aug.-4 Sep 1998, Birmingham, U.K.


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