Chemistry and plasma physics challenges for 2D materials technology
dc.contributor.author | Heyne, Markus | |
dc.date.accessioned | 2021-10-27T10:23:39Z | |
dc.date.available | 2021-10-27T10:23:39Z | |
dc.date.issued | 2019-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33148 | |
dc.source | IIOimport | |
dc.title | Chemistry and plasma physics challenges for 2D materials technology | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | De Gendt, Stefan | |
dc.contributor.thesisadvisor | Neyts, Erik | |
imec.availability | Published - open access |