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Observation of the stacking faults in In.53Ga.47As by electron channeling contrast imaging

dc.contributor.authorHsu, Brent
dc.contributor.authorHan, Han
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMerckling, Clement
dc.contributor.authorEneman, Geert
dc.contributor.authorMols, Yves
dc.contributor.authorCollaert, Nadine
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-27T10:33:23Z
dc.date.available2021-10-27T10:33:23Z
dc.date.issued2019
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33170
dc.sourceIIOimport
dc.titleObservation of the stacking faults in In.53Ga.47As by electron channeling contrast imaging
dc.typeJournal article
dc.contributor.imecauthorHsu, Brent
dc.contributor.imecauthorHan, Han
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMols, Yves
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecHsu, Brent::0000-0003-0823-6088
dc.contributor.orcidimecHan, Han::0000-0003-2169-8332
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewyes
dc.source.beginpage1900293
dc.source.journalPhysica Status Solidi A
dc.source.issue17
dc.source.volume216
dc.identifier.urlhttps://onlinelibrary.wiley.com/doi/abs/10.1002/pssa.201900293
imec.availabilityPublished - imec
imec.internalnotesSpecial issue Gettering and Defect Engineering in Semiconductor Technology, GADEST 2019


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